Based on the fabrication process of silicon piezoresistive sensors and the design of subsequent conditioning circuit, the measures for reducing the temperature effects on the sensors were discussed.
基于硅压阻式传感器的工艺过程与后续电路设计,讨论了减小其温度影响的措施。
Based on the fabrication process of silicon piezoresistive sensors and the design of subsequent conditioning circuit, the measures for reducing the temperature effects on the sensors were discussed.
基于硅压阻式传感器的工艺过程与后续电路设计,讨论了减小其温度影响的措施。
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