Typically used in the transistor element called the gate, polysilicon has been part of the standard chip-manufacturing process for decades.
多晶硅常用在被称作门的晶体管元件中，已在标准的芯片制造工艺中使用了几十年。
Application of TMAH solutions which is used as etchant in boron etch-stop and anisotropic etching process in the manufacturing of single-crystal and polysilicon pressure sensors is mainly discussed.
介绍了四甲基氢氧化铵(TMAH)溶液的腐蚀特性，论述了在单晶硅和多晶硅高温压力传感器的制作过程中，TMAH腐蚀液在浓硼终止腐蚀和各向异性硅杯腐蚀两个制作工艺中的应用。
The technological conditions of polysilicon preparation has an important effect on the manufacturing process.
在研制器件过程中，多晶硅制备的工艺条件对其性能影响较大。
The invention provides a system for separating and purifying trichlorosilane in production process of polysilicon and an operation method thereof.
本发明提出一种多晶硅生产过程中的三氯氢硅分离提纯系统及操作方法。
Through a CMP process, portions of the oxide layer are removed to substantially planarize the trench-filled oxide layer as the first polysilicon layer.
利用一化学机械研磨制程，移除该氧化 物层的部分区域，以使该填满沟槽的氧化物层与该第一多晶硅层大体上齐平。
The present invention relates to one kind of FET with polysilicon source and vertical channel structure and its preparation process.
本发明涉及一种具有垂直沟道结构的场效应晶体管，及它的制备方法。
Directional solidification process is an important part that of the physical metallurgy of solar energy polysilicon.
定向凝固工艺是物理冶金法制备太阳能级多晶硅的一个重要环节。
The invention relates to a treatment method of a byproduct sulfate in the process of producing solar grade polysilicon through the silane method.
本发明涉及硅烷法生产太阳能级多晶硅工艺中副产品硫酸盐的处理方法。
The invention relates to a treatment method of a byproduct sulfate in the process of producing solar grade polysilicon through the silane method.
本发明涉及硅烷法生产太阳能级多晶硅工艺中副产品硫酸盐的处理方法。
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