The substrate is placed into a process chamber.
基板置于处理腔内。
The system includes a process chamber housing workpieces to be processed;
装入待处理工件的处理室；
Embodiments of the present invention are directed to a gas distribution system which distributes the gas more uniformly into a process chamber.
本发明的实施例关于一种气体分配系统，其可将气体均匀地分配至制程处理室。
At the appropriate pressure, the chamber is opened to a high-vacuum pumping system that continues to reduce the pressure of the process chamber.
在适当的压强下，工艺室被接通高真空泵系统抽气，以继续降低工艺室的压强。
This process acts like a giant refrigerator, causing the gas (and rock) temperature inside the second chamber to drop to -160C.
这一过程就像是个巨大的冰箱，使得第二个筒仓里的氩气（和砂砾）温度骤减至零下160摄氏度。
Crushing chamber adopts multistage crush process and finely processing principle, its feature is huge impact, high production efficiency and large crushing ability.
粉碎室采用多级破碎流程及细碎原理装置，其特点是工作冲击力大、生产效率高、细碎能力强。
Based on ash chamber of metal etch this paper describes the full process of dry clean development and evaluation.
本文以金属刻蚀去胶腔为背景，简述干刻清洗工艺开发和评价过程。
We can repeat this process, creating our explosions more frequently as the compressor spins faster and faster, recharging the combustion chamber ever more quickly.
我们可以重复这一过程中，我们的爆炸造成更频繁的压缩机旋转速度越来越快，充电燃烧室更加迅速。
Chamber is one of the main parts of continuous extrusion machine, which produces complicated temperature environment in working process.
腔体是连续挤压机的主要零件之一，在工作过程中产生复杂的温度环境。
With the help of the Commercial Chamber, he finally watched the entire technical process of it. This, he thinks, will be of great reference to the development of the company's new products.
这次在商会的协调下能够完整地看到了其工艺流程，对于今后公司新产品的开发具有相当大的借鉴意义。
A process was designed which used quick lime as capture reagent of the dust and SO2, cyclone separator and sedimentary chamber as separation equipment.
设计了一种以生石灰为粉尘的捕获剂和SO2的净化剂，以旋风除尘器与沉降室为粉尘分离设备的工艺流程。
The transient space process of molecular in a toroidal vacuum chamber of tokamak device during pulse puffing gas has been simulated by Monte-Carlo method.
用蒙特卡罗方法研究了脉冲充气时气体分子在托卡马克装置的环形真空室内的瞬态空间过程。
Technique process of growth of the polycrystalline silicon is based on the adjustment of the heating chamber.
多晶硅锭的生长工艺过程都要通过加热室的调整来实现。
This book illustrated the whole process of the Chinese-French translation of The Dream of The Red Chamber, which cost 27 years and great effort dedicated by three persons.
本书讲述红楼梦一书历经27年被翻译成法文的过程，以及其中三人所付出的劳动。
Operating process of thrust chamber in spacecraft propulsion system is studied.
研究了飞船推进系统推力室工作过程。
The character and working procedure of double chamber fluidized bed is introduced. Its application and water treatment process is described.
介绍双室沸腾床交换器的特点和工作过程、水处理流程及应用。
Objective To observe the ultrastructural changes of various cell components in a nerve regeneration chamber during its regenerating process.
目的研究神经再生室中周围神经修复过程各组成成份的变化过程。
The device is distinguished by excellent polyurethane material, reasonable blood chamber shape, and advanced fabrication process.
这种装置的材料血液相容性优良，血室形态、结构设计合理，制作工艺和质量控制严格。
Taking operation al process into hydraulic pressure cake filtration phase and hydraulic pressure consolidation phase on the frame or chamber filter press with fixed volume are studied on this paper.
将滤室固定不变的板框或箱式压滤机的操作过程分成滤饼过滤阶段和液力压密脱水阶段两个过程来研究。
Has simulated the process of elevating temperature during rubber in the mixing chamber.
模拟了胶料在密炼机室中的升温过程。
This paper describes a pickling process for new piping system to a molecular sieve chamber (UOP molex adsorbent chamber), with the design, operation and its efficiency of pickling circulation.
本文介绍了分子筛吸附室的新管道酸洗回路的设计、酸洗工艺的效果。
In the process of emergency gate shutting in an orifice tunnel, big noise and strong vibration would be observed within the mid gate chamber.
在泄洪洞事故闸门动水下门过程中，洞内可能产生巨大的噪音和强烈的振动。
Compression process: with the rotor rotation, compression chamber volume decreases, the gas compressed with the compression chamber until the exhaust port to the forefront.
压缩过程：随着转子旋转，压缩腔容积不断减小，气体随压缩直至压缩腔前沿转至排气口。
Taking the automotive rear axle gear as an example, the design and adjusting of nitrogen-based atmosphere carburizing process were conducted on the new-built mult-purpose chamber furnace.
以汽车后桥齿轮为实例，在新制造的箱式多用炉上进行了氮基气氛渗碳淬火工艺的设计、调试和检测。
The fan component is produced using cold chamber pressure die casting process.
风机部件的创造采用冷腔室压力拉模铸造工艺。
About 1885, a process by which natural gas heats a roasting chamber and hot air is the only heating medium was developed, and this remains the best and most popular method of roasting coffee.
大约1885年，用天然气加热烘焙箱、以热空气作为唯一的热媒介的工艺就已经被开发了，这种工艺至今仍是最好最普及的咖啡烘焙法。
Due to the unique ability of levitating a charged char particle in a chamber, the electrodynamic balance technique can be used to probe the combustion process of single char particle in situ.
利用电动态平衡技术，将单个带电煤颗粒悬浮在样品池中，可以实现煤颗粒燃烧过程的原位微观研究。
Adopt oil-water mixture of combustion chamber and chimney installation process in the workshop with external, do not affect the workshop health.
采用油水混合的工艺燃烧室、引风机、烟囱安装在车间外部，不影响车间内卫生。
By means of increasing compress ratio and adopting a turbulent combustion chamber, the combustion process was improved.
通过采取增大压缩比、采用湍流型燃烧室的措施，可改善发动机的燃烧过程。
In this process the chamber and its furniture grew more and more dignified and luxurious;
在喝酒的过程中，房间和房间里的家具变得越来越富丽堂皇；
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