A precision positioning stage is designed in this paper, which can achieve high degree of accuracy in fixed movement range.
建立了一在固定运动范围内具有高精度定位能力的精密定位平台，分析了平台参数的确定方法。
The split morph can be used as precision positioner, especially as the secondary actuator in dual stage head positioning servo system of high density hard disk drives.
该分割电极压电致动器可用于精密定位，尤其适合在高密度硬磁盘驱动器的磁头定位两级伺服系统中作第二级致动器。
In order to improve the dynamic positioning precision of scanning electrochemistry microscope(SECM), the mathematic modeling and controller design of the piezo-stage are studied.
为提高扫描电化学显微镜（SECM）微定位系统的运动定位精度，对其压电工作台的数学模型和控制器设计进行了研究。
The closed aerostatic positioning stage driven by linear motor is a kind of typical precision machinery structure.
基于静压气浮支撑和直线电机驱动的气浮定位工作台是一种典型的精密机械结构。
This paper studies the work principle and structure of the rapid precision positioning system of 3D precision stage′s control system, and analyzes the system by theoretical and experimental methods.
对三维精密工作台快速定位系统的控制原理及结构组成进行了研究，并对系统进行理论和实验分析。
This paper studies the work principle and structure of the rapid precision positioning system of 3D precision stage′s control system, and analyzes the system by theoretical and experimental methods.
对三维精密工作台快速定位系统的控制原理及结构组成进行了研究，并对系统进行理论和实验分析。
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