The micro-motion worktable is the important part in micro-mechanical systems and the key component to achieve high-precision positioning.
微动工作台是微机械系统的重要组成部分，是实现高精度定位的关键部件。
This isolation designing method has a certain value of reference to isolation design on super-low transmission ratio of super-precision machine tools and super-micro positioning mechanisms, etc.
此隔振设计方法对超精密机床、超微定位机构超低传递率隔振设计有一定的参考价值。
A new micro-positioning control system using PZT for ultra-precision grinding was designed. The functions of this system include measure, compensate, drive, etc.
介绍了一种最新开发的面向精密磨床的压电陶瓷驱动微进给控制系统，该系统是一个驱动、检测和补偿为一体的闭环系统。
A new micro-positioning control system using PZT for ultra-precision grinding was designed. The functions of this system include measure, compensate, drive, etc.
介绍了一种最新开发的面向精密磨床的压电陶瓷驱动微进给控制系统，该系统是一个驱动、检测和补偿为一体的闭环系统。
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