This article will focus on the practical problems faced by the areas of IC manufacturing equipment, research high-acceleration and high-precision linear motor for scan.
本文将围绕IC装备制造领域所面临的实际问题，开展用于扫描的高加速度高精度的宏动直线电机的研究工作。
This grinder use electric spindle which hold by ceramic ball bearing as high-speed spindle system, and use linear motor as precision feed system.
该磨床选用陶瓷球轴承电主轴作为高速主轴系统，利用直线电机作为高速精密进给系统。
Linear switched reluctance motor (LSRM) has never been a popular choice for high precision and high speed motion actuator.
线性开关磁阻电动机的结构简单可靠，对于高精度和快速加工执行器是最好的选择。
The closed aerostatic positioning stage driven by linear motor is a kind of typical precision machinery structure.
基于静压气浮支撑和直线电机驱动的气浮定位工作台是一种典型的精密机械结构。
Adopting permanent magnet linear synchronous motor (PMLSM) direct drive is one of necessary approaches of realizing high precision.
采用永磁同步直线电机直接驱动是实现机床高精度进给的必要途径之一。
In this system, linear motor is applied, and under the control of computer, fast response of servo drive for tool feed, high positioning accuracy and high precision workpiece are achieved.
该系统用直线电机，在计算机的控制下，刀具进给伺服机构响应速度快，定位精度高，能高速、高精度地加工工件。
Thus, the control performance of system is influenced to a great extent by the model precision and the linear parameters of motor.
传统的矢量控制算法是建立在电动机数学模型的基础上的，系统的控制性能往往受模型的精确程度和电动机的参数影响较大。
With the increasing demands for higher accuracy and higher productivity of the ultra-precision equipments, ultra-precision gas bearing stage systems driven by linear motor become research hotspots.
随超精密装备加工精度和生产率的不断提高，直线气浮系统得到广泛重视和研究。
Gantry structures, Y axis use simultaneous dual motor and drive, X, Y, Z axis with circular rail (formula type linear guide can be chose), steady transmission, high precision.
龙门式结构，Y轴采用同步双电机双驱动，X、Y、Z三轴采用圆导轨（可选配方型直线导轨），传动平稳，运行。
Using linear stepper motor directly connected ball screw, response more accurately, because there is no middle part at the same time, simplify the mechanical structure, high precision.
不要出现在行程较长时抖动，有利于确保扫描精度，稳定的运动。使用线性步进电机直接连接滚珠丝杆、响应更加快速准确，因为没有中间部分同时，简化了机械结构，精度高。
Basic design concepts of Linear Shaft Motor are SIMPLE, NON-CONTACT and HIGH PRECISION.
线轴电机具有简便，无接触和高精度的设计特点。
Basic design concepts of Linear Shaft Motor are SIMPLE, NON-CONTACT and HIGH PRECISION.
线轴电机具有简便，无接触和高精度的设计特点。
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