The characteristic of spatial distribution of plasma ion density in reaction chamber were diagnosed by a Langmuir double probe, and the effect of Ar pressure and RF power were also investigated.
利用朗缪尔静电双探针诊断了蒸发镀膜装置反应室内等离子体密度及分析其分布规律,并分析了气压和功率对等离子体分布的影响。
Wind field parameters involved in wind field simulation include mainly turbulent wind power spectrum density and spatial-correlation function, which is measured and applied to wind simulation.
风场模拟涉及的风参数主要包括脉动风谱和空间相关函数,对风洞中的风场参数进行了实测拟合并应用于风场模拟当中。
Wind field parameters involved in wind field simulation include mainly turbulent wind power spectrum density and spatial-correlation function, which is measured and applied to wind simulation.
风场模拟涉及的风参数主要包括脉动风谱和空间相关函数,对风洞中的风场参数进行了实测拟合并应用于风场模拟当中。
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