If we select substrate temperature, laser power and the scan speed properly, we can get good crystallization. It is useful to the fabrication of SOI devices.
适当选择衬底温度、激光功率和扫描速度可望获得良好的结晶,它对SO I器件的制作是有意义的。
The finned crystallizers were compared with the horizontal crystallizers in efficiency and power consumption of crystallization process.
通过分析开车数据,对翅片式结晶器与卧式结晶器的结晶效率、结晶电耗进行比较。
With the increasing of sputtering time or the increasing of sputtering power or the decreasing of the particle loading amount, both crystallization and grain size of metal film were improved.
溅射时间越长或溅射功率越大或装载量越少,薄膜的平均厚度越厚,薄膜表面越粗糙,金属薄膜的结晶度就越高。
With the increasing of sputtering time or the increasing of sputtering power or the decreasing of the particle loading amount, both crystallization and grain size of metal film were improved.
溅射时间越长或溅射功率越大或装载量越少,薄膜的平均厚度越厚,薄膜表面越粗糙,金属薄膜的结晶度就越高。
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