In this study sacrificial oxidation is used as a post-etch treatment to reduce surface roughness and etch damage.

利用牺牲氧化改善刻蚀后的表面形貌，进一步减小表面的刻蚀损伤。

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In this study sacrificial oxidation is used as a post-etch treatment to reduce surface roughness and etch damage.

利用牺牲氧化改善刻蚀后的表面形貌，进一步减小表面的刻蚀损伤。

youdao