A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper.
设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。
The present invention discloses one kind of polysilicon film crystallization quality detecting device and detection and control method.
本发明公开一种多晶硅薄膜结晶品质的检测装置及其检测与控制方法。
According to the theory and the experiment mentioned in this paper, the factors which effect the growth rate of polysilicon film have been analysed.
文章还从实验和理论上分析了影响多晶硅薄膜生长速率的因素。
This paper introduces how to produce high quality polysilicon film in the semiconductor devices and how to monitor the deposition temperature at the same time when film grows.
本文介绍了半导体器件中的优质多晶硅薄膜的生长以及在生长多晶硅薄膜的同时怎样来监控淀积温度；
The present invention can reduce the hot electron effect in low-temperature polysilicon film transistor effectively and raise the stability of low-temperature polysilicon film transistor obviously.
运用本发明，可有效地降低公知低温多晶硅薄膜晶体管的热电子效应，使得低温多晶硅薄膜晶体管在工作时的稳定性能够有明显的改善。
A polysilicon thin film pressure sensor is presented. It utilizes polysilicon thin film as stress sensitive material.
介绍一种以多晶硅薄膜为敏感材料的压力传感器。
And new "thin film" solar cells, being promoted by Sharp and a host of start-ups, require little or no polysilicon and are thus not vulnerable to supply shortages.
由夏普公司和其它创造者联合开发的新型“薄膜”太阳能电池只要很少一点甚至不需要多晶硅，这就使得这些产品不会受多晶硅短缺的困扰。
The invention discloses a polysilicon thin film material and a preparation method thereof.
本发明公开了一种多晶硅薄膜材料及其制备方法。
The invention discloses a polysilicon thin film material and a preparation method thereof.
本发明公开了一种多晶硅薄膜材料及其制备方法。
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