The structure, principle and the maximum sensitivity optimum design method of pendulous micromachined silicon accelerometer (PMSA) are introduced in this paper.
文中介绍了扭摆式硅微加速度计的结构原理和对其进行最大灵敏度优化设计的方法。
The structure, principle and the maximum sensitivity optimum design method of pendulous micromachined silicon accelerometer (PMSA) are introduced in this paper.
文中介绍了扭摆式硅微加速度计的结构原理和对其进行最大灵敏度优化设计的方法。
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