Polysilicon films, due to its favourable piezoresistive properties, have been widely applied in MEMS piezoresistive sensors.
多晶硅薄膜良好的压阻特性使其在MEMS压阻式传感器中得到了广泛应用。
The pressure sensor is one of the core components in radiosonde. There are still some deficiencies in traditional silicon piezoresistive sensors.
气压传感器是探空仪中的核心部件之一，传统的硅压阻传感器应用于探空仪中还存在着一些不足。
Based on the fabrication process of silicon piezoresistive sensors and the design of subsequent conditioning circuit, the measures for reducing the temperature effects on the sensors were discussed.
基于硅压阻式传感器的工艺过程与后续电路设计，讨论了减小其温度影响的措施。
The SCX05DN pressure sensor is one of the SCX series sensors that is a typical integrated circuit piezoresistive pressure sensor with temperature compensated.
SCX05DN压力传感器是SCX系列传感器中的一种典型的带温度补偿的集成电路压阻式压力传感器。
This paper introduces hot wire, ultrasonic and silicon piezoresistive solid orthogonal wind sensors, and compares the performance of the three wind sensors.
介绍了热线式、超声波式、硅压阻固态正交式三类测风传感器，并对这三类测风传感器的性能进行了比较。
The sensibility correlation with temperature has been analyzed on the base of the principle of creating sensitivity temperature shifting in piezoresistive pressure sensors.
根据扩散硅压力传感器灵敏度温漂产生的原理，分析了灵敏度与温度的关系。
Optimum design considerations for poly diamond piezoresistive pressure sensors are demonstrated.
介绍了一种新型金刚石高温压力传感器的优化设计方法。
This paper analyses the origin of the temperature drift of the bridge offset for the piezoresistive pressure sensors and presents some of the compensation technique to minimize it.
本文分析了压阻型压力传感器的零点温漂产生的原因，并介绍几种补偿技术。
Several important problems on the design of the piezoresistive silicon pressure sensors are discussed in detail.
详细讨论了压阻型压力传感器设计中若刊重要问题。
The piezoresistive microcantilever sensors were optimized for various doping types by combining simulation and piezoresistive theory.
通过将模拟结果与压阻理论结合，分析了 表面应力作用下的压阻式微型悬臂梁传感器。
The piezoresistive microcantilever sensors were optimized for various doping types by combining simulation and piezoresistive theory.
通过将模拟结果与压阻理论结合，分析了 表面应力作用下的压阻式微型悬臂梁传感器。
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