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  • The short channel effects , the structure of LDD and SOI, phaseshift mask and multilevel interconnection were included.

    LDD和SOI结构； 移相掩模光刻技术和多层金属布线工艺。

    youdao

  • The short channel effects , the structure of LDD and SOI, phaseshift mask and multilevel interconnection were included.

    LDD和SOI结构； 移相掩模光刻技术和多层金属布线工艺。

    youdao

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