In the third part, the paper put forward a bidirectional improved path matching algorithm.
第三部分提出一种双向匹配的改进路径匹配算法。
Sub-micron accuracy of displacement detection is obtained by adopting edge fitting technology and path matching technology.
该方法采用边界拟合和“路径匹配”技术，使位移量的检测精度达到了亚微米级。
Sub-micron accuracy of displacement detection is obtained by adopting edge fitting technology and path matching technology.
该方法采用边界拟合和“路径匹配”技术，使位移量的检测精度达到了亚微米级。
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