A novel 2-D micro-positioner drived by PZT was introduced, which is based on the double flexible hinges in a structure of parallel four-linkage.
重点介绍了一种基于PZT驱动的双柔性平行四连杆结构二维微动工作台。
A novel 2-D micro-positioner drived by PZT was introduced, which is based on the double flexible hinges in a structure of parallel four-linkage.
重点介绍了一种基于PZT驱动的双柔性平行四连杆结构二维微动工作台。
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