An improved method of Angle measurement is proposed based on a parallel plate interferometer.
提出一种基于平行平板干涉仪的改进型角度测量方法。
A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection Angle measurement.
为了实现较大的偏转角度测量，该平行平板干涉仪引入了一位置探测系统。
An optimal design method of parallel plate interferometer is proposed in order to increase the measurement accuracy of angular displacement.
提出一种可提高平行平板角位移干涉测量仪测量精度的优化设计方法。
An optimal design method of parallel plate interferometer is proposed in order to increase the measurement accuracy of angular displacement.
提出一种可提高平行平板角位移干涉测量仪测量精度的优化设计方法。
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