Gas distribution lines for NF3 service should be fabricated from compatible materials and thoroughly cleaned to remove any oxidizable material.
用于NF 3设施的气体分配管道应该采用相容的材料制造，并彻底清洁以去除任何可氧化材料。
Gas distribution lines for NF3 service should be fabricated from compatible materials and thoroughly cleaned to remove any oxidizable material.
用于NF 3设施的气体分配管道应该采用相容的材料制造，并彻底清洁以去除任何可氧化材料。
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