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A second nitride etch stop layer is deposited over the first nitride etch stop layer.
一第二氮化物蚀刻终止层沉积于该第一氮化物蚀刻终止层上。
youdao
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A first nitride etch stop layer is deposited over the substrate.
一第一氮化物蚀刻终止层沉积于该衬底上。
youdao
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A first nitride etch stop layer is deposited over the substrate.
一第一氮化物蚀刻终止层沉积于该衬底上。
youdao