The specific parameters of main optical system are deduced from the requirement of pattern transfer for the projection aligner. The limit of these parameters is discussed.
本文从投影光刻机的图形传递要求出发，导出投影光刻机各主要光学系统的具体要求，并讨论这些参数确定的局限性。
The application of optical fibre data transfer in ship's engine room automation system is introduced in this paper. The multiple pattern of optical fibre data transfer is analysed and discussed.
本文就光纤数字传输在舰船机舱自动化系统中的应用进行了探讨，并分析论证了光纤数字传输的多路复用方式。
A novel optical communication scheme of 2D pattern transfer model based on multi-beam array in complex channel is proposed.
提出了一种利用多光束阵列在复杂散射信道中进行二维图案传输的理论模型。
A novel optical communication scheme of 2D pattern transfer model based on multi-beam array in complex channel is proposed.
提出了一种利用多光束阵列在复杂散射信道中进行二维图案传输的理论模型。
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