The basic concept of optical switch, MEMS and MEMS optical switch were introduced.
介绍了光开关、MEMS和MEMS光开关的基本概念。
Expansibility is a very important performance for the design of MEMS optical switch array.
在MEMS光开关阵列设计中，扩展性是一项非常重要的指标。
This is a typical optical, mechanical, electronic and calculated integral system and can be applied to the geometry and dynamic measurement of MEMS microstructure.
该系统是一个典型的光、机、电、算集成的MEMS测试系统，已应用于MEMS微结构几何尺寸和动态特性等的测量。
This system employed optical flow technology and microscopic interferometry combining with stroboscopic illumination to realize the measurement of in-plane and out-of-plane motions of MEMS devices.
系统分别采用光流技术和显微干涉技术，结合频闪照明的方法，对MEMS器件的面内和离面运动特性进行了测量。
The optical system of the micro digital sun sensor consists of APS CMOS image sensor and MEMS based diaphragm with pinhole array structure.
微型数字式太阳敏感器光学系统由APSCMOS图像传感器和基于MEMS工艺的小孔阵列式光线引入器组成。
The wavelength tuning of MEMS-based tunable vertical cavity semiconductor optical amplifiers (VCSOAs) at reflection mode are studied using transfer matrix method.
采用传输矩阵法对反射模式下的微机电可调谐垂直腔半导体光放大器的波长调谐特性进行研究。
Effects of residual stresses on the optical and mechanical performances of MEMS-based microgratings were investigated using finite element simulation method.
微型光栅结构薄膜中由于残余应力的存在引起器件在光学和机械性能方面发生显著变化。
Thought to be the next big wave, MEMS-based optical switching devices fizzled when the telecommunications market imploded.
随著电讯市场萎缩，曾经被认为是下一波热门产品的MEMS光学交换设备也跟著消失。
MEMS technology is thought as one of the most prospective manufacturing technologies for optical components.
MEMS技术由于其自身的诸多优点而被认为是目前最有前景的光器件制作技术之一。
A new kind of MEMS electromagnetic micro actuator was developed, which can drive mirrors enter or leave the optical path of the switch.
研制了一种摆动式微电磁驱动器，用其驱动反射镜切入和切出光路。
A new polyimide (PI) -cantilever MEMS optical switch of electromagnetic actuation is proposed, and the structure of the optical switch is designed and simulated.
介绍了一种新型的聚酰亚胺(PI)悬臂梁式电磁驱动微机电系统(MEMS)光开关，并对其总体结构进行了设计与仿真分析。
Some new MEMS optical switches are introduced in detail in this paper include structures, drives and scales.
近年来国际上出现的一些新型MEMS光开关，包括其结构、驱动方式、规模等。
Optical switch is an important functional device in optical fibre communication networks, MEMS optical switch is one of the most promiseful optical switches.
光开关是光通信网络的重要功能器件，MEMS光开关是最具发展前景的光开关之一。
This thesis presents a study on the non-silicon based MEMS optical switch and variable optical attenuator.
本硕士论文对基于非硅基微加工技术的光开关及可调光衰减器的设计制作与分析进行了研究。
Comparing with conventional electro-mechanical gyroscope and electro-optical gyroscope, MEMS gyroscope has the advantages of low cost, small size, low weight and high reliability.
微机电陀螺与传统的机电类陀螺和光电类陀螺相比，具有成本低、尺寸小、重量轻、可靠性高等优点。
The MEMS optical switch drive method was analyzed and the MEMS optical switch control system was researched according to electrostatic drive 2d MEMS optical switch.
分析了MEMS光开关的驱动方式，并针对静电驱动、二维mems光开关，研究了MEMS光开关控制系统。
Optical switches made with micro-electro-mechanical systems (MEMS) technology bear advantages of both MEMS and traditional optics.
微电机械系统（MEMS）光开关是微电机系统技术与传统光学技术相结合的新型机械式光开关。
A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.
针对基于微压印成形三维MEMS器件制造工艺多层压印的需要，开发了一套基于视频图像对正原理的压印光刻对准系统。
Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.
本论文在比较各种类型光开关的特点的基础上，结合现有的工艺条件，完成了一种使用常规体硅微机械加工工艺实现的光开关的设计和制作。
Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.
本论文在比较各种类型光开关的特点的基础上，结合现有的工艺条件，完成了一种使用常规体硅微机械加工工艺实现的光开关的设计和制作。
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