A new method is proposed to build a micromachined tunable optical filter array on glass base in visible band.
提出一种新颖的采用薄膜技术在玻璃基底上构造微机构可调谐二维窄带滤光片阵列的方法。
A new method is proposed to build a micromachined tunable optical filter array on glass base in visible band.
提出一种新颖的采用薄膜技术在玻璃基底上构造微机构可调谐二维窄带滤光片阵列的方法。
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