Results indicate that etching rates of BST thin films present non-monotonic dependence on mixing ratio of etching gases.

结果表明，刻蚀速率与刻蚀气体的混合比率呈现非单调特性。

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Results indicate that etching rates of BST thin films present non-monotonic dependence on mixing ratio of etching gases.

结果表明，刻蚀速率与刻蚀气体的混合比率呈现非单调特性。

youdao