Aim at the disadvantage of traditional sensor for structural health monitoring for long, a new type of micro capacitive sensor based on MEMS is developed.
针对传统的传感器无法进行长期健康监测的不足，研发出一套新型的基于MEMS的硅微电容式传感器。
Aim at the disadvantage of traditional sensor for structural health monitoring for long, a new type of micro capacitive sensor based on MEMS is developed.
针对传统的传感器无法进行长期健康监测的不足，研发出一套新型的基于MEMS的硅微电容式传感器。
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