In this dissertation. The theory and key technologies to measure long-range displacement with nanometer resolution by metrology grating is studied.
本文主要研究利用低线数计量光栅实现具有大量程、纳米级分辨率的位移测量理论及其关键技术。
In this dissertation, the technologies are studied which correlate to grating displacement measurement system with long-range displacement and nanometer resolution.
本文主要就大量程纳米级光栅位移测量系统的关键技术进行研究。
In this dissertation, the technologies are studied which correlate to grating displacement measurement system with long-range displacement and nanometer resolution.
本文主要就大量程纳米级光栅位移测量系统的关键技术进行研究。
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