The results show that n-type silicon piezoresistors should be long while p-type silicon piezoresistors should be short and placed in the root of the microcantilever to obtain higher sensitivities.
结果表明:为获得较高灵敏度,n型硅压阻应做长,p型硅压阻应做短并安排在固定端。
The results show that n-type silicon piezoresistors should be long while p-type silicon piezoresistors should be short and placed in the root of the microcantilever to obtain higher sensitivities.
结果表明:为获得较高灵敏度,n型硅压阻应做长,p型硅压阻应做短并安排在固定端。
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