On this problem, this study was to make the multi-wavelengths interferometry researches on nanometer scale measurement.
本课题针对这些要求，进行了光学多波长干涉法在纳米测量领域的应用研究。
It can realize multi wavelengths measurement simultaneously.
能够完成多波长同时测量。
It can realize multi wavelengths measurement simultaneously.
能够完成多波长同时测量。
应用推荐