Vertical scanner is the supporting part of a series process ion implanter, which transfer high speed movement from outside of the chamber to the target inside.
垂直扫描机构是单晶片离子注入机靶盘的支撑部件，起着将高速直线运动从靶室外传递到靶盘的作用。
The series products have characteristics of sensitive movement, high performance of sealing, stable medium pressure, high precision regulating, energy-saving and so on.
该系列产品具有动作灵敏、密封性能好、介质压力稳定、调节精度高、节能等特点。
The series products have characteristics of sensitive movement, high performance of sealing, stable medium pressure, high precision regulating, energy-saving and so on.
该系列产品具有动作灵敏、密封性能好、介质压力稳定、调节精度高、节能等特点。
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