An. integrated MOS ring oscillator pressure sensor with silicon box structure, having frequency as output is reported.
本文报道了一种硅盒结构的、具有频率输出的集成MOS环振式压力传感器。
An. integrated MOS ring oscillator pressure sensor with silicon box structure, having frequency as output is reported.
本文报道了一种硅盒结构的、具有频率输出的集成MOS环振式压力传感器。
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