So optical switch based on MOEMS technology will be a key optical device in the next generation optical communication system.
因此基于MOEMS技术的光开关将成为下一代全光通信网络的关键光器件。
Optical switch based on MOEMS technology obviously has more advantages than optical switch base on other technologies, such as wavelength transparence and polarize independence.
基于MOEMS技术的光开关和其他技术类型的光开关相比显然具有更多的优良性能，例如波长透明和偏振无关等。
Collimate and coupling technique is the key technology of MOEMS optical array.
准直、耦合技术是MOEMS光开关阵列的一项关键技术。
A novel MOEMS spatial resonator based on micro-nano machining technology was put forward. The principle and structure of the resonator were introduced.
提出了一种新颖的基于微纳米加工技术的MOEMS空间谐振腔结构，介绍了其工作原理和系统构成。
MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
This paper proposes MOEMS devices, make process and packaging technology.
文章介绍了MOEMS器件，主要就其制作工艺和封装技术做了讨论。
A MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
A MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
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