MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
A MOEMS optical switch based on electrostatic driving and vertical micro mirror technology is presented.
提出了一种基于静电驱动和垂直微反射镜技术的MOEMS光开关。
This paper presents theoretical analysis on the dynamic response of a MOEMS optical switch with a slant lower electrode.
本文从MOEMS倾斜下电极扭臂式光开关出发，介绍了动力学分析方法的过程。
Finally, by researching the mechanism of the anisotropy etching, the fabricating procedure of MOEMS optical switch array is designed.
最后，研究了各向异性腐蚀的机理，设计了MOEMS光开关阵列芯片的制作工艺。
The switching time calculation method of the electrostatic driven MOEMS optical switch with torsion beam structure was presented, and the formula of the switching time was given.
本文结合静电驱动扭臂式MOEMS光开关，给出了响应时间的计算方法，得出开关时间的计算公式。
This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto- electro -mechanical systems (MOEMS) optical switch with a slant lower electrode.
从基于微机械光电系统（MOEMS）的倾斜下电极扭臂式光开关出发， 求解雷诺方程， 得到空气压膜阻尼系数和阻尼力矩的分析公式。
Optical switch based on MOEMS technology obviously has more advantages than optical switch base on other technologies, such as wavelength transparence and polarize independence.
基于MOEMS技术的光开关和其他技术类型的光开关相比显然具有更多的优良性能，例如波长透明和偏振无关等。
So optical switch based on MOEMS technology will be a key optical device in the next generation optical communication system.
因此基于MOEMS技术的光开关将成为下一代全光通信网络的关键光器件。
So optical switch based on MOEMS technology will be a key optical device in the next generation optical communication system.
因此基于MOEMS技术的光开关将成为下一代全光通信网络的关键光器件。
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