In this article, we will present an overview of key issues of the MMEMS technology, such as coil fabrication, soft magnetic films and hard magnetic films fabrication.
本文就磁性MEMS技术中的线圈制作、软磁膜制备及硬磁膜制备等关键性问题加以概述。
In this article, we will present an overview of key issues of the MMEMS technology, such as coil fabrication, soft magnetic films and hard magnetic films fabrication.
本文就磁性MEMS技术中的线圈制作、软磁膜制备及硬磁膜制备等关键性问题加以概述。
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