The bilayer cantilevers, formed with a polysilicon layer and a gold layer, elevate the mirror plate according to residual stress-induced bending.
支撑臂由多晶硅层和金层构成，在残余应力的作用下发生弯曲而将镜体提起。
Stiffness and damping coefficients of force for film on mirror plate and moment of force for film on tilting pads are derived by making use of Taylor series expression of film pressure.
采用对油膜压力进行泰勒级数展开的方法，导出了油膜对镜板的作用力和油膜对可倾瓦的力矩的刚度阻尼系数。
Stiffness and damping coefficients of force for film on mirror plate and moment of force for film on tilting pads are derived by making use of Taylor series expression of film pressure.
采用对油膜压力进行泰勒级数展开的方法，导出了油膜对镜板的作用力和油膜对可倾瓦的力矩的刚度阻尼系数。
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