This paper presents a testing technology for optical fiber connector end surface based on microscopic interferometry.
本文研究了一种基于显微干涉的三维物体静测试系统，对光纤连接器端面进行了测量。
MEMS dynamic testing system based on stroboscopic microscopic interferometry is introduced. The algorithm of data analyzing is developed.
介绍了基于频闪显微干涉技术的MEMS动态测试系统的测量原理，设计了数据分析处理算法。
A stroboscopic microscopic interferometry based on Fourier transform method (FTM) is put forward to measure the out-of-plane motion of micro-resonator and micro-cantilever.
提出一种基于傅里叶变换的频闪显微干涉测试方法，对微谐振器和微悬臂梁的离面运动进行测试研究。
This system employed optical flow technology and microscopic interferometry combining with stroboscopic illumination to realize the measurement of in-plane and out-of-plane motions of MEMS devices.
系统分别采用光流技术和显微干涉技术，结合频闪照明的方法，对MEMS器件的面内和离面运动特性进行了测量。
A microscopic moire interferometry method with ultra high sensitivity was developed for in plane displacement measuring.
本文提出了一种具有超高灵敏度的显微液下云纹干涉法。
A microscopic moire interferometry method with ultra high sensitivity was developed for in plane displacement measuring.
本文提出了一种具有超高灵敏度的显微液下云纹干涉法。
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