A new optical interferometer suitable for using in the scanning force microscope is presented. The cantilever itself is used as a micro interferometer element.
目前在扫描力显微镜中经常用到的氮化硅三角形探针本身可以作为一个基于点微射干涉的微干涉元件。
A new experimental system is developed, which consists of long distance microscope, the three beam interferometer, digital image processing system and the software.
本实验系统中包含有长距离显微镜，三光束系统，数字图像采集和处理系统等。
A new experimental system is developed, which consists of long distance microscope, the three beam interferometer, digital image processing system and the software.
本实验系统中包含有长距离显微镜，三光束系统，数字图像采集和处理系统等。
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