We present the design and fabrication proc ess of a novel electro-magnetically actuated micropump.
主要阐述了一种新型电磁驱动微泵的设计和制作工艺。
Furthermore, the process of design and virtual fabrication of a new MEMS device, micropump, verified the system "s expansibility."
进一步用一种全新的器件微流量泵的工艺设计和虚拟加工过程验证了系统的可扩充性。
Furthermore, the process of design and virtual fabrication of a new MEMS device, micropump, verified the system "s expansibility."
进一步用一种全新的器件微流量泵的工艺设计和虚拟加工过程验证了系统的可扩充性。
应用推荐