This paper discusses the static model of a multi-finger micromechanical accelerometer.
讨论了一种梳齿式微机械加速度计的静态模型。
In this paper, the operating principle of a planar vibrator micromechanical silicon accelerometer, the way of preparation and the designing of the detecting circuit are introduced.
本文介绍了一种扭摆式微硅型加速度计的工作原理，制作方法和测试电路。
In this paper, the operating principle of a planar vibrator micromechanical silicon accelerometer, the way of preparation and the designing of the detecting circuit are introduced.
本文介绍了一种扭摆式微硅型加速度计的工作原理，制作方法和测试电路。
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