Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage.
微机械技术是研究，生产微机械器件和微电子机械系统的关键技术，熟练掌握并不容易。
Some commonly used micromachining technologies are introduced, few examples are also shown to illustrate the structure and performance of rate and acceleration sensors used these technologies.
介绍了几种在传感器制作中常用的微机械加工工艺，举例说明用微加工技术制作的角速率传感器及加速度传感器的结构及性能。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
Four fundamental manufacturing technologies namely bulk micromachining, surface micromachining, moulding and wefar bonding are introduced for Micro Electro Mechanical System(MEMS).
介绍了微电子机械系统的四种基本制作技术，即本体微机械加工、表面微机械加工、铸模工艺和晶片键合工艺。
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