Abstract: Lithographic exposure is the key process in the manufacture of integrated circuit, and the performance of exposure system decides the level of microelectronic manufacture technology.
摘要：投影曝光工艺是集成电路制造过程中的关键环节，曝光系统的工艺水平已成为衡量微电子制造技术的重要标志。
Lithographic exposure is the key process in the manufacture of integrated circuit, and the performance of exposure system decides the level of microelectronic manufacture technology.
投影曝光工艺是集成电路制造过程中的关键环节，曝光系统的工艺水平已成为衡量微电子制造技术的重要标志。
It has key courses of microelectronics: solid-state electronic theory, microelectronic devices and principles, integrated circuit design, micro-electronics processing, etc.
目前承担微电子专业方向的主干课程：固态电子论、微电子器件与原理、集成电路设计，微电子工艺等课程。
Integrated Circuit Process is an important core course for microelectronic majors.
集成电路工艺是微电子专业本科生重要的专业课程。
In chemical enterprise, integrated circuit and microelectronic device are adopted for most of the instruments. However, the integrated circuit is subject to lightning and static electricity.
化工企业仪表发展趋势大多是采用集成电路，微处理设备，但集成电路抗雷击、静电能力十分脆弱。
In chemical enterprise, integrated circuit and microelectronic device are adopted for most of the instruments. However, the integrated circuit is subject to lightning and static electricity.
化工企业仪表发展趋势大多是采用集成电路，微处理设备，但集成电路抗雷击、静电能力十分脆弱。
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