The experimental results are well accordant with the thermal analysis of the microcantilever unit.
实验结果与热机械模型的分析一致。
Working at tapping mode, atomic force microscope(AFM) piezoelectric microcantilever vibrates with large amplitude.
在轻敲工作模式下，原子力显微镜（AFM）压电微悬臂以较大的振幅振动。
A method to increase the detection sensitivity and to speed up analysis of microcantilever array biosensor is reported.
微悬臂列阵传感器在生物检测方面具有快速、痕量和非标记的特性。
A finite element model was used to optimize the parameters for a surface-stress sensitive piezoresistive microcantilever sensor.
为获得用于 表面应力测量的压阻悬臂梁 传感器的参数的优化方法，建立了有限元分析模型。
The piezoresistive microcantilever sensors were optimized for various doping types by combining simulation and piezoresistive theory.
通过将模拟结果与压阻理论结合，分析了 表面应力作用下的压阻式微型悬臂梁传感器。
An energy harvesting structure based on rectangle piezoelectric microcantilever was set up and the process of energy transform from vibration to electric was generally analyzed.
为此，以矩形压电微悬臂梁结构作为换能单元，通过对压电层等效电流源和单相桥式整流电路的理论及相关公式的推导，得出微能量功率的计算公式。
The results show that n-type silicon piezoresistors should be long while p-type silicon piezoresistors should be short and placed in the root of the microcantilever to obtain higher sensitivities.
结果表明：为获得较高灵敏度，n型硅压阻应做长，p型硅压阻应做短并安排在固定端。
The results show that n-type silicon piezoresistors should be long while p-type silicon piezoresistors should be short and placed in the root of the microcantilever to obtain higher sensitivities.
结果表明：为获得较高灵敏度，n型硅压阻应做长，p型硅压阻应做短并安排在固定端。
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