A nodal analysis model of electrically actuated microbeams was developed based on a weighted residual method.
采用加权残余法建立了静电驱动梁单元的节点法模型，在HSPICE中构建了相应的等效电路模型。
This paper introduces the light intensity data collection system of a microprocessor set, with a Z-80 microprocessor as its main unit, in the radius measurement of laser microbeams.
本文介绍了一台以Z- 80微处理机为主机的光强数据采集系统，并将它用于激光微光束的半径测量。
The method was described clearly. In the deflection of microbeams, the influence of the indenter tip pushing into the top of the microbeams and the curvature across its width must be considered.
运用该方法在研究微悬臂梁的弯曲形变过程中，必须考虑压头在微悬臂梁上的压入以及微悬臂沿宽度方向的挠曲。
The method was described clearly. In the deflection of microbeams, the influence of the indenter tip pushing into the top of the microbeams and the curvature across its width must be considered.
运用该方法在研究微悬臂梁的弯曲形变过程中，必须考虑压头在微悬臂梁上的压入以及微悬臂沿宽度方向的挠曲。
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