This paper introduces a multi-finger microaccelerometer based on MEMS technology, and describes the characteristic of the sensor microstructure and the system operation principle.
讨论了一种梳齿式微机械加速度计，介绍了表头微机构的特点和系统工作原理。
This paper introduces a multi-finger microaccelerometer based on MEMS technology, and describes the characteristic of the sensor microstructure and the system operation principle.
讨论了一种梳齿式微机械加速度计，介绍了表头微机构的特点和系统工作原理。
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