The principle, structure, design and calculating methods on micro displacement worktable with three degrees of freedom supported by elastic guides are presented.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
The micro-motion worktable is the important part in micro-mechanical systems and the key component to achieve high-precision positioning.
微动工作台是微机械系统的重要组成部分，是实现高精度定位的关键部件。
This paper presents the construction method and characteristic error calculation of the elastic leaf spring guide in a micro displacement worktable.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
This paper presents the structure, the principle and the designing and calculation method of the micro displacement worktable which has six degrees of freedom.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
This paper presents the structure, the principle and the designing and calculation method of the micro displacement worktable which has six degrees of freedom.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
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