With the maturing design of micro electrical mechanism systems (MEMS), the metrology for MEMS is becoming the hot research in the micro system technology.
随着微机电系统(MEMS)设计日趋成熟，度量问题越来越成为微系统技术中的热点。
With the maturing design of micro electrical mechanism systems (MEMS), the metrology for MEMS is becoming the hot research in the micro system technology.
随着微机电系统(MEMS)设计日趋成熟，度量问题越来越成为微系统技术中的热点。
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