In recent years, micro sensors, micro actuators, and micro mechanical components were lucubrated.
近年来，微传感器，微执行器和微机械部件得到了深入的研究。
Wireless sensor networks are networks of compact micro sensors with wireless communication capability.
无线传感网络是指由无线传感网络节点通过无线通信组成的网络。
There is the micro displacement mechanism equipped with inner micro sensors in the module, which integrates mechanism, actuator and sensors.
驱动器内部藏有电阻应变式角位移传感器，具有机构、驱动、检测一体化的特点。
Micro inertial Measurement Unit (MIMU) which made up of micro inertial sensors gives a great progress in the miniaturization and micromation of inertial instrument.
采用微机械惯性敏感器的微惯性测量组合使得惯性仪表小型化和微型化技术产生了一次新的飞跃。
With the development of sensors technology, Micro-Electro-Mechanism System(MEMS), modern networks and wireless communication technology, wireless sensor network (WSN) comes out and develops gradually.
无线传感器网络随着传感器技术、微机电系统、现代网络和无线通信等技术的进步孕育而生。
Micro gas pressure sensors are widely used in the fields of chemical industry, spaceflight, foodstuff processing, semi-conductor processing, electronic encapsulation and scientific researches.
微气压传感器广泛应用于化工、航天、食品加工、半导体加工、电子封装以及科学研究等领域。
Advanced micro acceleration sensors are used to build the high speed weigh-in-motion experimental platform, and the selection of sensors installation location is studied.
同时利用先进微传感器搭建了高速超载车检测试验平台，进行了传感器安装位置选择的研究。
It can be shown that the resonant micro inertial sensors have excellent characteristics, spacious application and development prospect.
从中反映出谐振式微惯性传感器具有优良的特性，必有广阔的应用和发展前景。
This kind of micro electric activity spreads along the conductor of men to the surface of the body, thus we can get the ECG by electrodes (sensors).
这种微观的电活动沿人体这一容积导体传至体表，通过电极传感器便可得到心电波形。
Capacitive sensors from Micro-Epsilon are used, among other things, for the positioning, displacement measurement and thickness measurement in the semiconductors area.
德国米铱公司提供的电容式位移传感器被用于以纳米级的精度校准芯片光刻机中镜片的位置，测量晶圆厚度等应用。
Microbridge mass airflow sensors of AWM series, a new kind of airflow sensors, applied in micro airflow measurements is presented.
介绍一种新型气体流量传感器——AWM系列微桥式气流质量传感器在微小气体流量测量中的应用。
The third part is to use the sputtering, photolithography to produce heaters and temperature sensors which heat the reaction micro chamber and provide the temperature condition for the PCR reaction.
第三，用溅射、光刻等工艺在微型腔体底部制作微型加热器和温度传感器，实现对反应腔体的加热及其温度的精确测量，提供PCR扩增反应所需的温度条件。
Typical electromechanical integration yuan, components are: power electronic devices and devices, programmable logic controller, fuzzy controller, micro-motors, sensors, ASIC, servo institutions.
典型的机电一体化元、部件有：电力电子器件及装置、可编程序控制器、模糊控制器、微型电机、传感器、专用集成电路、伺服机构等。
Electrochemical toxic gas sensors are micro fuel cells, designed to be maintenance-free and stable for long periods.
电化学毒气传感器是一种微燃料电池元件，不必保养而可以有长期的稳定性。
This paper introduces the computer simulation for the anisotropic etching used in micro-machining of sensors.
本文介绍传感器微机械加工中使用的各向异性腐蚀的计算机模拟。
In this paper, the basic physics and the design of the new micro sensor are described, and compared with conventional eddy current sensors by means of the experimental effect.
介绍了基本原理和新型传感器的设计，并通过实验与传统涡流传感器进行了比较。
Results of the research and experiments in this paper are beneficial to deign and fabrication of micro pressure sensors. The micro machining technology can also be used for other MEMS products.
论文的相关研究和实验结果对于微压力传感器的设计、制作具有一定的参考价值，微加工工艺的相关研究结论也可以应用在其它微机电器件的制作上。
Currently, micro gas sensors have become one of the major MEMS fields, and semiconductor gas sensors are the mainstream.
制作微型化的气体传感器是MEMS应用的主要领域之一。半导体气敏传感器，是当前MEMS气敏传感器的主流。
Silicon micro -optical force sensors were also developed to study and optimize the geometry and operation procedure of the microinjectors and self-assembly positioning chip.
研制了硅微光学力传感器，并用来研究和优化显微注射器自组装定位芯片的几何结构和操作程序。
The analytic solution is important to predict the reliability of micro inertial sensors worked in shock environment.
此冲击响应解析解对预测微惯性传感器在冲击环境下的可靠性具有重要作用。
In view oi the problems existing in the silicon micro pressure sensors, this paper proposes the chemical etching techniques and the selective etching processes to control diaphragm thickness.
并针对硅微压传感元件研制中存在的问题，提出采用化学腐蚀技术，选择性腐蚀工艺控制膜厚。
The photo electronic length measuring instrument consists of photo electronic sensors, measuring stands, grating digital displays and micro computer data processing.
光电测长系统由光电传感器测试头、样品工作台、台式光栅数显表和微机数据采集处理系统组成。
The principle of micro -gas pressure measurement system based on SOC was investigated and the measurement system configuration including temperature sensors was outlined.
研究了基于SOC的微气压测试系统的工作原理，设计了基于集成温度传感嚣的微气压测试系统。
The loading effect of sensors is often an inevitable problem in micro-electromechanical systems(MEMS).
传感器对被测对象的负荷效应是微机电系统中不可忽视的一个问题。
The test results show that both of the two sensors respond to an external electric field linearly, but the sensor with amplification-compliant micro-transmissions has higher sensitivity.
测试结果表明，两种传感器都具有线性的输出特性，且带有位移放大机构的电场传感器具有更高的灵敏度。
This paper describes several kinds of micro-mechanical acceleration sensors used to measure acceleration, and analyses the internal working principles of these typical structures from each category.
对几类测量加速度的微机械式加速度传感器进行了讨论，并针对每种类别分别选取一种典型的结构，分析了内部的工作原理。
According to practical applications, the micro-sensors and the electronic devices can be powered forever by energy harvesting.
针对具体应用环境，为微型传感器和电子器件的长期自供能提供了思路。
Porous silicon and its preparation technology have been used broadly in the fields of micro-sensors because of its special performance in physics, chemistry and optics.
多孔硅由于其独特的物理、化学和光学性能及技术优势，已经在微传感器领域得到广泛的应用。
According to gyro application in micro-satellites, a new gyro bias real-time on-orbit calibration technology is presented and it is independent of any other sensors.
结合陀螺在微小卫星上的使用，提出了一种不依赖于其余敏感器信息的陀螺随机常值偏置实时在轨标定技术。
According to gyro application in micro-satellites, a new gyro bias real-time on-orbit calibration technology is presented and it is independent of any other sensors.
结合陀螺在微小卫星上的使用，提出了一种不依赖于其余敏感器信息的陀螺随机常值偏置实时在轨标定技术。
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