In view oi the problems existing in the silicon micro pressure sensors, this paper proposes the chemical etching techniques and the selective etching processes to control diaphragm thickness.
并针对硅微压传感元件研制中存在的问题，提出采用化学腐蚀技术，选择性腐蚀工艺控制膜厚。
Results of the research and experiments in this paper are beneficial to deign and fabrication of micro pressure sensors. The micro machining technology can also be used for other MEMS products.
论文的相关研究和实验结果对于微压力传感器的设计、制作具有一定的参考价值，微加工工艺的相关研究结论也可以应用在其它微机电器件的制作上。
Micro gas pressure sensors are widely used in the fields of chemical industry, spaceflight, foodstuff processing, semi-conductor processing, electronic encapsulation and scientific researches.
微气压传感器广泛应用于化工、航天、食品加工、半导体加工、电子封装以及科学研究等领域。
The principle of micro -gas pressure measurement system based on SOC was investigated and the measurement system configuration including temperature sensors was outlined.
研究了基于SOC的微气压测试系统的工作原理，设计了基于集成温度传感嚣的微气压测试系统。
The unsteady surface pressure on stator blade of an axial compressor was measured by means of mounting micro-sensors on blades surface.
本文对一台单级轴流压气机静子叶片非定常表面压力进行了测量。
The unsteady surface pressure on stator blade of an axial compressor was measured by means of mounting micro-sensors on blades surface.
本文对一台单级轴流压气机静子叶片非定常表面压力进行了测量。
应用推荐