Due to space limit, the motion equations are often coupled when the micro positioning stage has multiple links and freedoms. Thus, synthesis and decouple are necessary.
当微定位台的结构是多环、多自由度时，由于空间的限制，通常其运动方程是耦合的，需对它进行综合分析和解耦。
This isolation designing method has a certain value of reference to isolation design on super-low transmission ratio of super-precision machine tools and super-micro positioning mechanisms, etc.
此隔振设计方法对超精密机床、超微定位机构超低传递率隔振设计有一定的参考价值。
Fuzzy control and adaptive inverse control using in the micro-positioning system are introduced.
介绍了模糊控制和自适应逆控制在微位移系统控制中的应用。
Combining computer system and detecting device, the micro-positioning system of compound control is designed and researched. This system is based on feedforward and digital PID control.
结合检测装置和微机控制系统，设计并研制了基于前馈控制同数字PID反馈控制相结合的复合控制的微定位系统。
A new micro-positioning control system using PZT for ultra-precision grinding was designed. The functions of this system include measure, compensate, drive, etc.
介绍了一种最新开发的面向精密磨床的压电陶瓷驱动微进给控制系统，该系统是一个驱动、检测和补偿为一体的闭环系统。
A new micro-positioning control system using PZT for ultra-precision grinding was designed. The functions of this system include measure, compensate, drive, etc.
介绍了一种最新开发的面向精密磨床的压电陶瓷驱动微进给控制系统，该系统是一个驱动、检测和补偿为一体的闭环系统。
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