Micro Electro Mechanical System (MEMS) is a course of new technology rising in recent years. Micro planetary gear reducer is the important part in MEMS.
微机电系统(MEMS)是近年来兴起的一门新兴技术，微行星齿轮减速器是微机电系统中的重要器件。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
The nanoindentation technology is an advanced measurement of material's micro and nano hardness, which can satisfy the detection of surface mechanical properties of micro parts.
纳米压痕技术是一种先进的材料微纳米硬度测量方法，可以满足对微小零件表面力学性能的检测。
As a kind of MEMS actuators, micro mechanical radio frequency switch is a representational structure of micromechanical technology, and basis of many micro mechanical components.
微机械射频开关作为MEMS执行器的一种，是微机械技术中的一类有代表性的结构，是很多微机械器件的基础。
A new technology of laser surface micro-molding is introduced, and the mechanical face seal ring cross-scale processing of the geometric shape is researched.
介绍了激光表面微造型新工艺新方法，对机械密封环端面进行跨尺度的几何形貌加工工艺研究。
Micro adhesive bonding technology shows great potential in the assembly of micro-electro-mechanical system (MEMS) products.
微胶接技术非常适用于微机电系统产品的自动化装配过程。
As the rapid development of MEMS technology, the application demand of micro parts for various kinds of products in micro mechanical system is growing.
随着MEMS技术的飞速发展，微型塑件在各种微型机电产品中的应用需求越来越多。
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
Optical switches made with micro-electro-mechanical systems (MEMS) technology bear advantages of both MEMS and traditional optics.
微电机械系统（MEMS）光开关是微电机系统技术与传统光学技术相结合的新型机械式光开关。
The micro-electron mechanical processing technology is adopted as the key production technology.
采用微电子机械加工技术作为关键制作技术。
Micro-Electro-Mechanical-System is the integration of mechanical elements, sensors, actuators, and electronics micro-fabrication technology.
微型机电系统技术是机械，传感器，电子，精密加工，半导体等技术的结合。
Micro-Electro-Mechanical-System is the integration of mechanical elements, sensors, actuators, and electronics micro-fabrication technology.
微型机电系统技术是机械，传感器，电子，精密加工，半导体等技术的结合。
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