Micro cantilever probe of atomic force microscope (AFM) is a typical micro mechanical component, which is under a coupling deformation during the contact scanning process.
原子力显微镜（AFM）的微探针系统是典型的微机械构件，它在接触扫描过程处于耦合变形状态。
Micro actuator, as the important MEMS component, has become the research focus in Micro-Electronic Mechanical Systems (MEMS) field.
微驱动器作为微机械电子系统的核心部件，一直是微型机械电子系统(MEMS)的研究热点。
Fiber reinforced concrete is a kind of heterogeneous material, which mechanical properties not only rest with the performance of component material, but micro-structure characteristic of material.
纤维增强混凝土是一种多相材料，其力学性能不仅取决于各组分材料的性能，同时也取决于材料的细观结构特性。
The micro-motion worktable is the important part in micro-mechanical systems and the key component to achieve high-precision positioning.
微动工作台是微机械系统的重要组成部分，是实现高精度定位的关键部件。
The micro-motion worktable is the important part in micro-mechanical systems and the key component to achieve high-precision positioning.
微动工作台是微机械系统的重要组成部分，是实现高精度定位的关键部件。
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