The non silicon micro machining process and some devices such as different kinds of micro hinges are reported.
本文讨论了非硅微机械工艺和微绞链的研制工艺。
It illustrates the micro machining process, and describes the experiment to investigate the performance of micropump.
对芯片的加工工艺流程进行了说明，同时对微泵进行了试验研究。
Micro abrasive water jet machining (MAJM) is becoming an important machining technique for cost effective micro machining.
微磨料水射流加工技术正成为制造微细结构零件重要的经济高效的微细加工技术。
Based on some related micro machining processes, a process flow is planed to fabricate make the piezoresistive sensor chip successfully.
基于一些相关的微加工工艺制定了制作这种微传感器的工艺流程并且制作成功了传感芯片。
We developed a non silicon surface micro machining process with two or three mask electroplating layers and using polyimide or photoresist as sacrificial layers.
我们研制的非硅表面微机械工艺采用两次或三次掩模电镀层，聚酰亚胺和光刻胶分别作为底层和第二、第三层的牺牲层。
The results show that YAG laser micro machining of Al 2O 3 plates used for the manufacture of the gas sensor arrays is easily controllable, flexible, convenient and cheap.
研究表明激光微加工方法制作纳米气敏传感器阵列是一种可控性好、灵活、方便、廉价的制作方法。
Results of the research and experiments in this paper are beneficial to deign and fabrication of micro pressure sensors. The micro machining technology can also be used for other MEMS products.
论文的相关研究和实验结果对于微压力传感器的设计、制作具有一定的参考价值，微加工工艺的相关研究结论也可以应用在其它微机电器件的制作上。
To make a transducer by painstakingly micro-machining a brittle block of ceramic material can take many hours of work, though.
但是制造一个换能器需要利用微机械技术，在一块质地脆硬的陶瓷材料上精心加工，耗费数个小时才能完成。
This paper is focused on developing micro electrochemical fabrication processes, including micro electroforming and micro electrochemical machining.
开展了微细电化学加工技术的试验研究工作，内容包括微细电铸和微细电解加工。
On the base of the program pre-reading and the smooth algorithm between lines for micro-beeline machining of CNC milling, the arc smooth algorithm with linear transformation is brought forward.
在数控铣微直线加工程序预读、直线段间平滑算法的基础上，提出了线性变换圆弧平滑算法。
Four promising laser assisted manufacturing approaches are introduced, including die-less laser forming, laser shock processing, laser micro-machining, and laser based direct metal deposition.
介绍了激光板与管无模成形、激光表面强化处理、激光微细加工和激光直接沉积成形等四种激光制造前沿研究技术。
Micro Abrasive Jet Machining (MAJM) is a promising technique for micro processing of hard and brittle materials, particularly for machining complicated three - dimensional microstructures.
微磨料空气射流加工（MAJM）技术是对硬脆材料进行微细加工的一种非常有潜力的技术，特别是对复杂的三维微细结构的加工。
The accurate analysis method of performances plays an important role in the optimization with multiple performance objectives of micro electrical discharge machining (EDM).
加工工艺参数准确合理的分析方法是优化组合电火花微细加工中多目标工艺参数的重要前提和保证。
The crystallographic effects on critical depth, micro cutting forces and surface waviness when machining single crystals are emphatically investigated.
重点研究了加工单晶材料时晶向对临界切深、微切削力和表面粗糙度的影响；
Based on the questions of micro-rod machining, non-traditional machining (NTM) which are used widely are analyzed.
针对微细轴的加工问题，分析了当前普遍使用的特种加工方法。
Wire electrochemical micromachining(WEMM) is a recent new method for micro-machining.
微细电化学线切割加工是最近出现的一种微细加工新方法。
Precision machining, as a manufacturing technique of micro - optical components, has many advantages which are difficult or even impossible for other traditional methods.
超精密机械加工技术作为微光学元件的一种制造方法，具有很多其他传统方法所不具有的优点。
A novel MOEMS spatial resonator based on micro-nano machining technology was put forward. The principle and structure of the resonator were introduced.
提出了一种新颖的基于微纳米加工技术的MOEMS空间谐振腔结构，介绍了其工作原理和系统构成。
The forming mechanism of different micro structures fabricated by micro electrical discharge machining (EDM) deposition was studied.
对微细电火花沉积加工中沉积所得不同微细结构的成形机理进行了研究。
The micro abrasive jet machining (MAJM) technology was used to make micro channels on the glass.
采用微磨料气射流加工技术(MAJM)，对普通硅酸盐玻璃进行微流道槽加工。
The electrolytic products are hard to be removed from machining gap in micro-ECM (electrochemical machining) process, which may lower machining speed or stop the machining process.
微细电解加工时，由于间隙微小，生成的电解产物因难以从加工区域中移除而降低了加工速度甚至中断加工。
In order to use electro discharge machining (EDM) technology to manufacture micro-machines, analyzed the key technologies of micro EDM, and developed a micro EDM machine tool.
为了将电火花加工技术应用到微机械制造中，分析了微细电火花加工中的关键技术，开发了微细电火花加工机床。
To probe into machining mechanism in micro cutting, the minimum cutting depth for achieving stable machining was discussed.
为探讨微切削的加工机理，对能稳定切削的最小切削深度进行了研究。
The electrolytic products are hard to be removed from the small machining gap in micro ECM(electrochemical machining) process, which decrease the machining efficiency, stability and quality.
微细电解加工时，微小加工间隙内的电解产物难以移除，会降低加工效率、影响加工稳定性和质量。
A useful method for adjusting the micro-cutting depth when machining holes on a round bar is presented.
介绍了一种方便实用、可在加工外圆、内孔时进行切深微量调节的方法。
Contrast the two machining method between turn-milling and turning, research the effect on machining precision of micro-shaft parts about cutting depth.
通过车铣和车削两种加工方法的对比，重点研究了切削深度对微细轴类零件加工精度的影响问题。
According to machining instances (i. e. micro-hole machining for two different materials), this new-style power supply is analyzed and illustrated.
通过微细孔加工对这种新型的电源进行了分析和说明。
Based on the analysis of structure of micro-base-parts, drew up a detailed route of the complete machining process.
在对微小型座体零件结构分析的基础上，制定了基于车铣加工技术、以实现完整加工为目标的详细加工工艺路线。
Based on the analysis of structure of micro-base-parts, drew up a detailed route of the complete machining process.
在对微小型座体零件结构分析的基础上，制定了基于车铣加工技术、以实现完整加工为目标的详细加工工艺路线。
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