The structure can reduce the parasitic capacitance of the sensor, improve the negative resistance characteristics of the sensitive film, and be used in micro gyroscope.
该结构降低了器件的寄生电容，改善了敏感薄膜的负阻特性，适用于共振隧穿效应陀螺。
The orthogonal coupling error, non-linear of the drive mode, temperature effect and parasitic capacitance of a fully-symmetrical micro gyroscope are test and analyzed in this paper.
本文针对一种全对称微机械陀螺，对其正交耦合误差、驱动非线性、温度特性以及寄生电容来源进行了测试与分析。
MiraMEMS Sensing Technology Co. , Ltd focuses on the development and production of micro-motor sensor products, including the accelerometer, gyroscope and electronic compass.
明镐电子专注于微电机传感器件的研发和生产，产品包括加速度传感器、陀螺仪和电子罗盘。
This paper presents a robust optimal model of Micro Electro Mechanical Systems (MEMS) gyroscope and its design procedure.
提出了基于灵敏度分析的微机械陀螺稳健优化模型，开发了相应的稳健设计流程。
The micro quartz crystal tuning fork gyroscope is a new type of vibratory gyroscope.
石英音叉陀螺是一种新型的振动陀螺。
The relationship between input angle and output differential capacitance is presented for the realization of the capacitance signal detection of micro electromagnetic disk levitating gyroscope.
为了实现磁悬浮转子微陀螺的电容检测，使用数值积分方法计算了新型磁悬浮转子微陀螺的电容值与转子倾斜角度的关系。
The effect of primary structure dimensions on nature frequency of micro-machined gyroscope is studied by finite element analysis software-ANSYS.
然后，对微机械陀螺的动力学特性进行研究，并且采用有限元对其进行模拟，分析其主要几何尺寸对其模态的影响。
For these shortcomings, the research on the design of driving circuits ASIC for capacitance micro-machined gyroscope is presented in the dissertation.
针对这些不足，本论文主要研究电容式微机械陀螺驱动电路ASIC设计。
Considering the characteristics of PLL, the dual self-excited driving circuits for capacitance micro-machined gyroscope are designed.
结合锁相环的特性，设计一种电容式微机械陀螺双环路自激驱动电路。
In the paper, the phase theory and amplitude theory of self-excited driving circuits for micro-gyroscope are analyzed based on mastering the work principles of micro-gyroscope.
在掌握微陀螺原理基础上，本论文对微陀螺自激驱动环路相位理论和幅度理论进行分析。
With the development of science and technology, the high-performance micro-machined gyroscope becomes a major product that the markets demand.
随着科技的进步，高性能微机械陀螺成为市场主要需求产品。
To calculate the electrostatic force in the micro machined gyroscope is a key problem in the mechanical characteristic of it.
准确计算静电力是分析微机械陀螺力学特性的关键。
To calculate the electrostatic force in the micro machined gyroscope is a key problem in the mechanical characteristic of it.
准确计算静电力是分析微机械陀螺力学特性的关键。
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